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Prof. Dr. W. Hansen
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Equipment and experimental setups of the research group growth (Halbleiterepitaxie)
View of the UHV cluster
UHV-Cluster for Molecular Beam Epitaxy (MBE) includes:
Riber C21TM MBE chamber.
Riber 32 P MBE chamber.
Metal MBE chamber.
In-situ Process chamber.
In-situ STM chamber.
Set of standard equipment for sample processing and lithography.
Metallization chamber.
Ellipsometer - Sentech SE401-S.
Optical microscope - Olympus.
Access to the clean room, SEM, EBL, wet and dry ion etching.
Experimental setups for structural investigation:
Atomic force microscope (AFM) - Nanoscope Dimension 3100 with lithography option.
AFM - Anftec Level-AFM.
High resolution laboratory X-ray diffractometer - Panalytical Xpert Pro.
Experimental setups for investigation of electrical properties of our heterostructures:
3
He-
4
He dilution cryostats.
Transport and DLTS measurements setup.
Capacity measurements setup.
Scanning capacity microscope.
Impressum
Page last modified on: May 21, 2013, at 12:29 PM