Equipment and experimental setups of the research group growth (Halbleiterepitaxie)

View of the UHV cluster

UHV-Cluster for Molecular Beam Epitaxy (MBE) includes:

• Riber C21TM MBE chamber.
• Riber 32 P MBE chamber.
• Metal MBE chamber.
• In-situ Process chamber.
• In-situ STM chamber.

Set of standard equipment for sample processing and lithography.

• Metallization chamber.
• Ellipsometer - Sentech SE401-S.
• Optical microscope - Olympus.
• Access to the clean room, SEM, EBL, wet and dry ion etching.

Experimental setups for structural investigation:

• Atomic force microscope (AFM) - Nanoscope Dimension 3100 with lithography option.
• AFM - Anftec Level-AFM.
• High resolution laboratory X-ray diffractometer - Panalytical Xpert Pro.

Experimental setups for investigation of electrical properties of our heterostructures:

• ³He-⁴He dilution cryostats.
• Transport and DLTS measurements setup.
• Capacity measurements setup.
• Scanning capacity microscope.