Reciprocal space images of buried InGaAs/GaAs QDs around
the 220 reflection at different incidence angles.


Evolution of X-ray reflectivity spot.

High resolution X-ray nanostructure investigations

Some literature overview:

• R. Tholapi, L. Liefeith, G. Ekindorf, K. Perumal, T. Slobodskyy, and W. Hansen, Effect of low-temperature post-growth annealing on anisotropic strain in epitaxial Fe layers deposited on GaAs(001), J. Appl. Phys. 119, 245304 (2016)
• A. Zozulya, T. Slobodskyy, Th. Bartsch, A. Wetzel, D. Sonnenberg, Ch. Heyn, M. Sprung, W. Hansen, Embedded GaAs nanopillars studied by high resolution reciprocal space mapping and SEM, Phys. stat. sol. (a), 1-6 (2014).
• P. Schroth, T. Slobodskyy, D. Grigoriev, A. Minkevich, M. Riotte, S. Lazarev, E. Fohtung, D. Z. Hu, D. M. Schaadt, T. Baumbach Investigation of buried quantum dots using grazing incidence x-ray diffraction. Materials Science and Engineering: B 177, 721 (2012).
• Slobodskyy, A. et al. In-depth analysis of the CuIn1−xGaxSe2 film for solar cells, structural and optical characterization. Appl. Phys. Lett. 97, 251911 (2010).
• Riotte, M. et al. Lateral ordering, strain, and morphology evolution of InGaAs/GaAs(001) quantum dots due to high temperature postgrowth annealing. Appl. Phys. Lett. 96, 083102-3 (2010).
• Minkevich, A.A. et al. Selective coherent x-ray diffractive imaging of displacement fields in (Ga,Mn)As/GaAs periodical wires. arxiv (2009).
• Renaud, G., Lazzari, R. & Leroy, F. Probing surface and interface morphology with Grazing Incidence Small Angle X-Ray Scattering. Surf. Sci. Rep. 64, 255-380 (2009).
• Keplinger, M. et al. Structural Investigations of Core−shell Nanowires Using Grazing Incidence X-ray Diffraction. Nano Letters 9, 1877-1882 (2009).